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Bosch Semiconductors for Automotive

APSM and other wet processes

APSM

The APSM (Advanced Porous Silicon Membrane) process was developed by Bosch.

Bosch can generate a low density porous silicon. Optional can a subsequent anneal and epi silicon growth create a monocrystalline silicon membran on a defined and hermetically sealed cavity.

Porous silicon after anodization
Porous silicon after anodization

Porous layer:

  • Porosity range:  ~50 – 70%
  • Thickness range: ~ 2 – 20µm
  • Doping: ~ 2 – 3Ohm cm
Membrane and cavity after anneal and epi Si growth
Membrane and cavity after anneal and epi Si growth

Resulting cavity:

  • Membrane thickness range: >= 4µm
  • Cavity thickness range: ~ 2 – 10µm
  • Cavity size tested: ~ 200 – 700µm

Benefits

  • Fully CMOS compatible
  • No bond frames needed > smaller chip sizes
  • Monocrystalline Si membranes
  • Full flexibility regarding size and shape of the membrane

Wet Cleans and Etch

All typical semiconductor Cleaning Procedures

  • Wet bench incl. Marangoni dry
  • FSI spray batch tool
  • SAT spray etch backend and organic cleans
  • Single wafer cleans
  • SEZ
  • Develop-removal of polyimide
  • Specialties

Available Chemistry:

  • Wet and organic
  • HF, BHF, H2O2, H3PO4, SC1, SC2, various organic and metal etch chemistries (like EKC, DNP+, …), TMAH