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Automotive semiconductors and sensors from Bosch

Built to evolve: Bosch launches its 3rd generation SiC MOSFETs

Taking silicon carbide semiconductors to the next level of performance, robustness, and heat dissipation

Gen 3 advances Bosch’s proven SiC trench architecture with lower on-resistance, superior ruggedness, and smaller chip sizes for broader EV adoption.
  • Silicon carbide (SiC) semiconductors are key to making electric vehicles more efficient and increasing their range. Bosch is driving development forward by introducing its third generation SiC MOSFETs.
  • Gen 3 SiC semiconductors build on Bosch’s proven dual-channel trench architecture, advancing it through four upgrades that improve performance, robustness, and heat dissipation.
  • A 20 percent reduction in specific on-resistance, around 10 percent higher short-circuit withstand capability, and a 40 percent thinner die enable clear efficiency gains and more cost-effective power module designs.
  • Gen 3 silicon carbide MOSFETs support the transition from premium EV applications to broader vehicle segments.

Evolution takes us to the future, one step at a time. In nature, it operates gradually, enabling a species to withstand greater stress, occupy new habitats, and flourish where others cannot. In power electronics, the logic is strikingly similar. With the introduction of Bosch’s third-generation SiC MOSFETs we are taking the next step in a gradual evolution, achieving greater performance and robustness in ever smaller chips.

Gen 3 SiC technology improves overall performance and optimizes the balance between efficiency and ruggedness – a key objective throughout Bosch’s power electronics evolution. At the same time, the reduced die size has a direct impact on production efficiency and system-level costs, further supported by the transition to 200 mm wafer manufacturing, which increases chip output per wafer. While Bosch’s SiC chips are already well-established in the demanding environment of high-performance electric vehicles, Gen 3 now aims to extend across the entire EV spectrum, from premium sports cars to mass-market models.

Ready to take the next evolutionary step

The starting point is Bosch’s proven vertical trench architecture. Its dual-channel design maximizes the active area for current conduction by using both sides of the gate trench. This increases channel density and decreases resistance, a key factor in how a MOSFET works in high-efficiency switching circuits. Deep p-type shielding regions protect the gate structure and limit saturation current in short-circuit scenarios. It is a mature design widely used in power semiconductor applications such as traction inverters. However, even proven semiconductor architectures offer room for refinement. This is where Gen 3 comes into play: as the next evolutionary step in SiC MOSFET technology.

The changes of Gen 3 in numbers

Gen 3 SiC MOSFETs offer measurable improvements in three key areas for automotive applications: electrical performance, thermal performance, and ruggedness.

Three bar charts display changes from Generation 1 to 3 in different performances with percentage values.
Gen 3 demonstrates significant improvements in key performance and robustness indicators.

Electrical performance: Gen 3 delivers a 20 percent reduction in RonA compared to Gen 2. This reduces conduction losses and increases inverter efficiency, enabling smaller chip areas and more compact, cost-efficient designs. Improved capacitance characteristics contribute to a reduction in switching losses of around 10 percent during typical traction inverter operation.

Thermal performance: Reducing die thickness by 40 percent directly enhances heat dissipation and thermal conductivity. This supports higher power density and more efficient thermal management in high-performance semiconductor systems.

Ruggedness: The short-circuit withstand capability increases by about 10 percent, supported by the optimized two-zone JFET region and enhanced gate oxide design. The design also improves robustness against parasitic turn-on at high switching speeds. Additionally, the intrinsic body diode is optimized for soft recovery behavior across the full automotive temperature range of -40°C to 200°C, reducing electrical stress during switching events and supporting stable operation under demanding conditions.

Four architectural upgrades

These performance and robustness improvements stem from four architectural modifications in Gen 3, which maintain the strengths of the Gen 2 architecture.

Chart illustrating the improvements in the SiC MOSFET architecture from Gen 2 to Gen 3
Advancements in Gen 3 SiC-MOSFET architecture, including the trench (green), the new shield implant below the trench (blue), and the two-zone JFET region (yellow).

Firstly, an additional p-type shielding region was introduced directly below the trench, which provides full protection against off-state electric fields. This contributes to improved long-term gate oxide reliability under typical operating conditions. The existing hard mask of the trench etching process was reused for the new trench shield implant, eliminating the need for an additional lithographic process step.

Secondly, Gen 3 features a two-zone structure in the JFET region beneath the trench, a geometrical current constriction between adjacent p-body regions that defines the current path and strongly influences both current density and electric field distribution. Each channel now corresponds to its own JFET region, providing significantly finer control over electric field distribution during both normal operation and fault events. This substantially improves the critical trade-off between on-resistance (RonA) and short-circuit withstand time (SCWT), expanding the available design space for robust, high-performance SiC power semiconductors.

Chart showing continuous improvement of Gen 3
Gen 3 improves the trade-off between on-resistance (RonA) and saturation current (Isat) during a short-circuit event, allowing for higher robustness without compromising conduction performance.

Lastly, the die thickness in Gen 3 is reduced by 40 percent to only 100 µm. This reduces material usage and places the active semiconductor layer closer to the heat sink, accelerating heat dissipation.

Anne Bedacht

The Gen 3 upgrades are noteworthy for two reasons: their combined effect and how our engineers integrated them into well-established production processes. Our design-for-manufacturability approach ensures that Gen 3 is production-ready and cost-effective from the outset.

Anne Bedacht, Head of Product Management for Power Semiconductors at Bosch

Conclusion

Until now, the performance advantages of SiC semiconductors have made them particularly attractive for premium and high-performance electric vehicles, where efficiency and power density justify the cost. Gen 3 changes the economic equation: With reduced chip size and improved efficiency, system costs decrease while performance rises. This is supported by scalable 200 mm wafer production, which improves manufacturing efficiency and homogeneity. Combined with enhanced thermal behavior and ruggedness, Gen 3 enables compact, efficient inverter and power module designs across a wider range of EV platforms. This evolutionary step strengthens the role of silicon carbide semiconductors as a key technology for next-generation electric mobility.

Frequently asked questions about Bosch’s Gen 3 SiC MOSFETs

Bosch is currently introducing Gen 3 SiC MOSFETs to the market, with broader availability expected in 2027. Samples are currently already being supplied to global automotive manufacturers.

Production is based in Reutlingen, Germany, with an additional site in Roseville, California (USA).

New SiC generations are manufactured on 200 mm wafers, enabling higher chip output per wafer and improved process stability.

Key applications include the traction inverter, DC/DC converter, and on-board charger, where efficient power conversion and switching performance under demanding conditions are essential.

Close coordination between semiconductor and inverter teams enables early alignment of device characteristics with system-level requirements.

Expert perspective

Anne Bedacht, Head of Product Management for Power Semiconductors

Anne Bedacht

Head of Product Management for Power Semiconductors

Responsible for shaping customerfocused product portfolios and robust power semiconductor roadmaps at Bosch

With a strong background in semiconductor development and customer engagement, Anne Bedacht translates market and technology trends into futureready power semiconductor portfolios. In her role, she balances technical innovation and commercial requirements to ensure that customers receive the right solutions at the right time, delivering efficiency, performance, and longterm value across diverse applications.

Want to learn more about the perspective behind Bosch’s power semiconductor product strategy? Discover how Anne Bedacht connects market insight, technology trends, and customer needs to shape robust product roadmaps for the future.