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MEMS sensors

Bosch covers all aspects of MEMS sensors for automotive applications, from development to manufacturing. With more than 23 billion MEMS sensors produced to date, Bosch is a proven expert in MEMS sensor technology and one of the world’s largest suppliers of MEMS sensors for vehicles. Explore our innovative technologies and products for automotive applications and find out how we create sensor solutions for a better life.

MEMS sensor key applications

Safety Systems

MEMS sensors from Bosch are essential for various applications in safety systems. They detect vehicle deceleration for airbag deployment, measure rotation and lateral acceleration in vehicle dynamics control, and monitor tire pressure in Tire Pressure Monitoring Systems that alert drivers to unsafe conditions.

ADAS

In Advanced Driver Assistance Systems, precise sensor data is essential for highly automated driving. It enables lane keeping and verifies vehicle movement information. Moreover, MEMS sensors with lower performance requirements are also increasingly utilized for navigation and telematics features.

Comfort systems

MEMS sensors transmit chassis dynamics data to active suspension systems and enable greater comfort and driving safety. Low-pressure sensors in pneumatic seats monitor the pressure in the air chamber, which can then be adapted to the driver's individual anatomy and reduces driver fatigue on long journeys.

ICE powertrain systems

Barometric pressure sensors are vital for engine control units in ICE powertrain systems. They measure ambient pressure variations from altitude, weather, and temperature changes. This data helps to optimize engine performance, fuel efficiency, and enables accurate calculation of the air-fuel mixture.

Road Noise Cancellation

In RNC systems, Bosch's MEMS acceleration sensors continuously detect vibrations caused by road noise close to the wheels. Based on this data, audio systems can effectively reduce interior noise with appropriate counter-frequencies.

Vibration Monitoring

Our sensors with a bandwidth of 10 kHz precisely detect the occurring vibrations in condition monitoring systems. The early detection of unusual frequencies enables predictive maintenance or performance optimization as well as the timely detection of system problems to avoid system downtimes.

Our MEMS sensor portfolio

Sensor type
Key application
Package
Safety systems
Acceleration sensor

SMA750

  • Sensing axes: Y
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA751

  • Sensing axes: Z
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA755

  • Sensing axes: X
  • Range: ±240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA758

  • Sensing axes: X
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA780

  • Sensing axes: X
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA781

  • Sensing axes: Z
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA790

  • Sensing axes: X
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA720

  • Sensing axes: X,Z
  • Range: 128 g (ax) / 32 g (az)
  • Output: SafeSPI, 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA760

  • Sensing axes: X,Z
  • Range: ±128 g (X,Y)
  • Output: SafeSPI, 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA752

  • Sensing axes: X,Y
  • Range: ±120/240/480 g
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA753

  • Sensing axes: X,Z
  • Range: ±120/240/480
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA757

  • Sensing axes: X,Y
  • Range: ±240/480
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA765

  • Sensing axes: X,Y
  • Range: ±240
  • Output: SafeSPI
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA773

  • Sensing axes: X,Y
  • Range: ±30/60
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA774

  • Sensing axes: X,Z
  • Range: ±30/60
  • Output: PSI5, 10 bit or 14 bit
  • Package: SOIC8n
Safety systems
Acceleration sensor

SMA777

  • Sensing axes: X,Y
  • Range: ±30/60
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA778

  • Sensing axes: X,Z
  • Range: ±30/60
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA782

  • Sensing axes: X,Y
  • Range: ±120/240/480
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA783

  • Sensing axes: X,Z
  • Range: ±120/240/480
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Acceleration sensor

SMA792

  • Sensing axes: X,Y
  • Range: ±240/480
  • Output: PSI5, 10 bit or 14 bit
  • Package: LGA SiP
Safety systems
Angular rate sensor

SMG810

  • Sensing axes: X
  • Range: ±300 °/s
  • Output: SafeSPI
  • Package: BGA64
Safety systems
Inertial sensor

SMI720

  • Sensing axes: Ωx,az
  • Range: 300 °/s, 5 g
  • Output: SPI
  • Package: BGA64
Safety systems
Pressure sensor

SMP470

  • Range: 45.5 – 110 kPa (enhanced: 140 kPa)
  • Output: PSI5 (V1.3 / V2.1), 10 bit or 16 bit
  • Package: LGA8 (solderless contacting only)
Safety systems
Pressure sensor

SMP475

  • Range: 45.5 – 110 kPa (enhanced: 140 kPa)
  • Output: PSI5 (V1.3 / V2.1), 10 bit or 16 bit
  • Package: SOIC8
Safety systems
Pressure sensor

SMP290

  • Range:
    • 90 kPa to 920 kPa for PC
    • 90 kPa to 1,500 kPa for CV
    • ax: -330 g to 330 g
    • az: -960 g to 960 g
  • Output: BLE V5.3
  • Package: DFN (4.5 x 3.5 mm²)
Safety systems
Inertial sensor

SMI860

  • Range: ±300 °/s (Ωxz), ±6 g (axyz)
  • Output: SafeSPI
  • Package: BGA64
Safety systems
Inertial sensor

SMI800

  • Range: ±300 °/s (Ωz), ±6 g (axy)
  • Output: SafeSPI
  • Package: BGA64
Safety systems
Inertial sensor

SMI810

  • Range: ±300 °/s (Ωx), ±6 g (ayz)
  • Output: SafeSPI
  • Package: BGA64
Safety systems
Inertial sensor

SMI700

  • Range: ±300 °/s (Ωz), ±5 g (axy)
  • Output: SPI, PSI5, CAN
  • Package: BGA64
Safety systems
Inertial sensor

SMI710

  • Range: ±5 g (axy)0 °/s (Ωx), ±5 g (ayz)
  • Output: SPI, PSI5, CAN
  • Package: BGA64
ADAS
Inertial sensor

SMU200

  • Sensing axes: Z (Ω), X, Y (a)
  • Range: ±300 °/s (Ωz), ±6 g (axy)
  • Output: SafeSPI 16-bit
  • Package: CLCC16
ADAS
Inertial sensor

SMU210

  • Sensing axes: X, Z (Ω), X, Y, Z (a)
  • Range: ±300 °/s (Ωz), ±6 g (axy)
  • Output: SafeSPI 16-bit
  • Package: BGA64
ADAS
Inertial sensor

SMI240

  • Sensing axes: X, Y, Z (Ω), X, Y, Z (a)
  • Range: ±300 °/s (Ω) ±16 g (a)
  • Output: SPI (out-of-frame)
  • Package: LGA, 3.3 x 3.3 mm²
ADAS
Inertial sensor

SMI270

  • Sensing axes: X, Z (Ω), X, Y, Z (a)
  • Range: ±300 or ±500 °/s (Ω) ±4 g or ±16 g (a)
  • Output: SPI (out-of-frame) 16-bit (SPI)
  • Package: Open cavity LGA, 5 x 5 mm²
ADAS
Acceleration sensor

SMA130

  • Sensing axes: X, Y, Z
  • Range: ±2 g ±4 g ±8 g ±16 g
  • Output: SPI, I²C 14-bit
  • Package: LGA12
ADAS
Acceleration sensor

SMA131

  • Sensing axes: X, Y, Z
  • Range: ±2 g ±4 g ±8 g
  • Output: SPI, I²C 14-bit
  • Package: LGA12
ADAS
Angular rate sensor

SMG130

  • Sensing axes: X, Y, Z
  • Range: ±125 °/s ±250 °/s ±500 °/s ±1,000 °/s ±2,000 °/s
  • Output: SPI, I²C 16-bit
  • Package: LGA16
ADAS
Inertial sensor

SMI130

  • Sensing axes: X, Y, Z (Ω) X, Y, Z (a)
  • Range: ±2 g (a) ±4 g (a) ±8 g (a) ±16 g (a)
  • Output: SPI, I²C 16 bit (Ω) 12 bit (a)
  • Package: LGA16
ADAS
Acceleration sensor

SMA270

  • Sensing axes: X,Y,Z
  • Range: ±4 g ±16 g
  • Output: SPI 16 bits (SPI)
  • Package: Open-cavity LGA 5x5 mm²
ADAS
Acceleration sensor

SMA130

  • Sensing axes: X, Y, Z
  • Range: ±2 g ±4 g ±8 g ±16 g
  • Output: SPI, I²C 14-bit
  • Package: LGA12
Comfort systems
Acceleration sensor

SMA731

  • Sensing axes: X
  • Range: ±16 g
  • Output: PSI5 14 bit
  • Package: SOIC8n
Comfort systems
Acceleration sensor

SMA732

  • Sensing axes: Y
  • Range: ±16 g
  • Output: PSI5 14 bit
  • Package: SOIC8n
Road Noise Cancellation
Acceleration sensor

SMA380

  • Range: ±10/20 g (ax, ay, az)
  • Output: TDM, I²C 16 Bit
  • Package: LGA 2.3x2.8 mm²
Road Noise Cancellation
Inertial sensor

SMA735

  • Range: ±16 g (ax, ay)
  • Output: PSI5
  • Package: SOIC8n 4.9x6 mm²
Vibration Monitoring
Acceleration sensor

SMA285

  • Range: ±16/32 g (ax, ay, az)
  • Output: SPI 16 Bit
  • Package: BGA 3x3 mm²
Vibration Monitoring
Acceleration sensor

SMA286

  • Range: ±16/32 g (ax, ay, az)
  • Output: TDM, I²C 16 Bit
  • Package: LGA 2.3x2.8 mm²
ADAS
Acceleration sensor

SMA131

  • Sensing axes: X, Y, Z
  • Range: ±2 g ±4 g ±8 g
  • Output: SPI, I²C 14-bit
  • Package: LGA12
ADAS
Angular rate sensor

SMG130

  • Sensing axes: X, Y, Z
  • Range: ±125 °/s ±250 °/s ±500 °/s ±1,000 °/s ±2,000 °/s
  • Output: SPI, I²C 16-bit
  • Package: LGA16
ICE powertrain systems
Pressure sensor

SMP581

  • Range: 40 to 115 kPa
  • Output: SPI 10 or 12 bit
  • Package: DFN8

MEMS sensors for automotive applications – technology from Bosch for safer and smarter vehicles

Automotive MEMS (Micro-Electro-Mechanical Systems) sensors are the key to many vehicle components, including airbag and vehicle dynamics systems, driver assistance systems, adaptive chassis control, navigation, and seat comfort. They are also enablers for highly automated driving, motion detection, and gesture recognition.

How automotive MEMS sensors from Bosch enhance system performance and efficiency?

Automotive MEMS sensors are exposed to an extreme environment that is marked by moisture, vibrations, chemicals, dust, and high temperature differences. Bosch's MEMS sensors for automotive applications are designed to meet high standards regarding accuracy, safety, and reliability even under these challenging conditions. The combination of MEMS structures and ASICs enables integrated self-tests and advanced safety concepts, making them ideal for demanding automotive applications.

With over 23 billion MEMS sensors produced to date, Bosch is one of the global leaders in automotive sensor technology and has played a pivotal role in the widespread adoption of MEMS sensors in the global automotive industry. The invention of the trench etch or “Bosch process” (DRIE = Deep Reactive Ion Etching) made it possible to create vertical structures in silicon for the first time. In 1995, the start of concepts. Today, every new vehicle contains around 20 MEMS sensors, one third of which are from Bosch.

What are the key functions of MEMS sensors in vehicles?

MEMS sensors for automotive applications from Bosch are versatile and can detect movement, pressure, humidity, flow, noise, gases, or magnetic fields depending on the application. The miniature systems enable high-precision measurements with great sensitivity and can be integrated into devices in the smallest of spaces. Their low power consumption makes them suitable for energy-efficient applications in many vehicle components.

How do Bosch MEMS sensors for automotive applications improve safety?

Automotive MEMS sensors are indispensable for safety-critical applications, such as airbag and vehicle dynamics systems, driver assistance systems, and automated driving. Bosch offers MEMS sensors for automotive applications that meet the highest safety requirement (ASIL D) for electronic components in vehicles.